The 2-Minute Rule for CLBO Crystal
The 2-Minute Rule for CLBO Crystal
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During this paper, the new lapping slurry and sharpening slurry are introduced. Plus the deliquescence degree of CLBO is fallen to most affordable. A brand new Doing work engineering is also adopted. Right after tough polishing, the concentration of ultra-precision sprucing slurry is increased correctly. So does the ultra-precision sprucing velocity, and the wiping velocity is quicker compared to deliquescence speed. The CLBO crystal floor roughness can reach 1nm and maintain the floor excellent perfectly. Obtain by your institution
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We summarized The present enhancement status from the higher-electricity DUV laser both with the wavelength of FHG of your 1-μm laser and at 193 nm. The modern enhancement from the reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts don't just the standard energy but additionally the beam top quality (coherence) from the DUV lasers to an unprecedented level.
The typical ability with the NIR laser still has the probable to become improved to tens of watts for instance 70 W [26] if the double-pass configuration may very well be used with the Yb:YAG SCF amplifier stage. Therefore, In case the conversion performance of 31% from NIR to DUV might be nevertheless maintained at this larger electric power condition, the typical output electrical power on the DUV laser at 258 nm may very well be much more than twenty W, which might certainly be a remarkable energy stage for your DUV laser and cause the unanticipated DUV laser machining success. Additionally, for high-ability DUV laser, the UV problems in the nonlinear crystal, such as the windows for CLBO crystal and the mirrors, is another essential parameter for long lasting and stable Procedure.
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On the opposite side, the ability scaling of the NIR laser is an additional element to enhance the regular power on the 193-nm DUV laser. Because of the deficiency of the high-ability amplification Remedy with the NIR laser (for instance at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could be applied to make a wavelength converter by shifting the wavelength from one μm to the specified wavelength in addition to acquiring relative bigger energy [21]. Just lately, a diamond Raman laser confirmed its capacity in obtaining a significant electric power and a high conversion performance within the 1st Stokes with the 1-μm laser [22,23], which implies the likelihood being utilized within the 193-nm DUV laser technology as a consequence of its substantial Raman acquire and huge frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics in the Nd:YAG fundamental laser wavelength. In an effort to boost the harm threshold, very low CLBO surface area roughness, by extremely-precision machining, is needed. Since the CLBO crystal has simple hydroscopic response and micro scratches in machining, extremely-specific machining on the CLBO crystal is a hard technical dilemma.
Tunable ultraviolet laser resource dependant on good-point out dye laser know-how and CsLiB6O10 harmonic era
The conversion performance from fundamental NIR to DUV is from 5% to 36% in accordance with the noted brings about Table 1. Expanding the conversion efficiency will decrease the stress on the look and setup of the basic laser amplifier plus the electric powered power usage. A fantastic beam high-quality of the fundamental laser may also contribute towards the escalating on the conversion effectiveness and the suitable electricity intensity of your NIR and environmentally friendly laser in the SHG and FHG process, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all over 50%, respectively [12], which corresponds to the conversion performance of 35% from basic to DUV.
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